Semiconductor/Microelectronics removal electrostatic
Case description
Semiconductor/Microelectronics removal electrostatic
In high-precision industrial production processes such as silicon wafer and chip cutting, silicon wafer cleaning, solar cell cleaning, LCD panel cleaning, and photomask cleaning, static electricity is generated. To prevent the harmful effects of static electricity and maintain the surface cleanliness of chips, silicon wafers, solar panels, and other products, water containing ions is needed to remove static electricity and impurities. Currently, the mainstream technology in the industry involves injecting carbon dioxide into ultrapure water to prepare ion-containing cleaning water, which effectively addresses static electricity effects while achieving product surface cleanliness.
Sci-Nano has independently developed the MBC-2509 membrane contactor component that uses PTFE hollow fiber membranes as the gas dissolution medium to achieve the injection of clean CO2 into ultrapure water without pollution, providing an efficient solution for preparing ion-containing ultrapure water. Carbon dioxide gas uniformly dissolves through the membrane wall of the PTFE hollow fiber membrane into the ultrapure water outside the membrane fibers, using this superhydrophobic PTFE hollow fiber membrane to separate the CO2 gas from the ultrapure water. The release amount of CO2 and its dissolution in water can be precisely controlled through the adjustment device in the gas dissolution equipment, thereby achieving precise control of water resistivity. The product water resistivity can be easily and accurately adjusted to a range of 0.1-2 MΩ·cm.
The MBC-2509 membrane contactor component utilizes superhydrophobic membrane fibers with strong hydrophobicity, chemical stability, high porosity, high mechanical strength, and long service life. This effectively avoids liquid infiltration and interface damage caused by hydrophilization of the membrane fibers during long-term operation, ensuring the service life of the membrane contactor. In addition to the membrane material itself, Sci-Nano has also optimized the structure and process of the
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